<正> Variation of the surface adhesion force during the formation of octadecyl trichlorosilane(OTS) self-assembled monolayer on a glass substrate surface was investigated by atomic forcemicroscope(AFM).The research shows that the hydrophobicity and the adhesion force of the samplesurface increases gradually while the substrate surface is covered by OTS molecules as the reactionproceeds.After 15min reaction,a close-packed and smooth OTS self-assembled monolayer couldform on the glass substrate surface with an advancing contact angle of 1050 and an interfacial en-ergy of 55.79mJ.m-2.