Energy Filtering and Coaxial Detection of the Backscattered Electrons in Scanning Electron Microscope

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2000,（9）
• 页码范围: 637-639
• 页数: 3页
• 语种: 英文

摘要

A new detection system in scanning electron microscope, which filters in energy and detects the backscattered electrons close to the microscope axis, is described. This technique ameliorates the dependence of the back. scat tering coefficient on atomic number, and suppresses effectively the relief contrast at the same time. Therefore this new method is very suitable to the composition analysis.