Synthesis of Nano-Crystalline Diamond Film in Hot Filament Chemical Vapour Deposition by Adding Ar

• 来源期刊: 中国物理快报（英文版）
• 学科: 物理学
• 年，卷（期）: 2001,（2）
• 页码范围: 286-288
• 页数: 3页
• 分类号: O4
• 语种: 英文

摘要

Nano-crystalline diamond films are successfully deposited on silicon substrates via the hot filament chemical vapour deposition process using a CH4/H2/Ar gas mixture. The as-grown films are analysed by using field emission scanning electron microscopy, micro-Raman spectroscopy and x-ray diffraction. These results show that the films consist of nano-diamond grains with sizes ranging from 10 to l00 nm, and argon is an important element in the formation of nano-crystalline diamonds.