ANALYSIS OF NANO CHANNEL FORMATION IN QUARTZ CUBES BY LASER-INDUCED PROCESS

• 来源期刊: 力学学报（英文版）
• 年，卷（期）: 2004,（2）
• 页码范围: 125-131
• 页数: 7页
• 语种: 英文

摘要

A novel laser processing technique was developed for making channels in the nano regime in this paper. A Nd:YAG laser was used to dry fabricate micro channels (25μm～100μm diameter) in a 1 cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (～104 depth to width ratio). A possible mechanism is proposed to explain the formation of the nano channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.