DYNAMICS OF MECHANICALLY AND ELECTROSTATICALLY COUPLED MICROCANTILEVERS;Effect of adiabatic heating in some processes of plastic deformation;Evaluation of kerfless linear arrays; MECHANICALLY CORNER-COUPLED SQUARE MICRORESONATOR ARRAY FOR REDUCED SERIES MOTIONAL RESISTANCE;Finite element modeling of the thermo-electro-mechanical coupling in pyroelectric infrared sensor arrays; Medical ultrasonic transducer using composite materials for acoustic matching layers-computer simulations of transducer arrays;