旋压模

• 来源期刊: 金属加工工艺与设备：英文版
• 学科: 工学
• 关键词: 旋压模 电介质蚀刻 片焊工艺 等离子损伤
• 年，卷（期）: 2005,（2）
• 页码范围: 45-47
• 页数: 3页
• 分类号: TG375.41

摘要

Backend dielectric etch induced wafer arcing mechanism and solution;Chipping generation in high precision dicing process of LSI wafer;Colossal tooling design with 3-D simulation;Computational Tool for the Analysis of the Manufacturing Process of Seamless Tubes;Constellation-X cylinder figuring and polishing studies;