Formation of arrayed holes on metal foil and metal film by multibeam interfering femtosecond laser beams

• 来源期刊: 中国物理(英文版)
• 关键词: array microstructure interference femtosecond laser diffractive beam splitter
• 年，卷（期）: 2005,（6）
• 页码范围: 1181-1184
• 页数: 4页
• 语种: 英文

摘要

We report on an optical interference method to fabricate arrayed holes on metal nickel foil and aluminum film deposited on glass substrate by means of five-beam interference of femtosecond laser pulses. Optical microscope and scanning electron microscope observations revealed that arrayed holes of micrometre-order were fabricated on both metal foil and metal film. The present technique allows one-step, large-area, micrometric processing of metal materials for potential industrial applications.