Two-Dimensional Self-Consistent Kinetic Model for Solenoidal Inductively Coupled Plasma

• 来源期刊: 等离子体科学和技术（英文版）
• 年，卷（期）: 2007,（1）
• 页码范围: 30-34
• 页数: 5页
• 语种: 英文

摘要

A two-dimensional self-consistent kinetic model was developed to study the influence of the various factors on the electron energy distribution function. These factors include gas pressure, the driving frequency, the radius and length of the inductively coupled plasma equipment, the amplitude of the radio-frequency coil current, and the number of turns of rf coils. The spatial profiles of the rf electric field and power density have also been calculated under the same parameters. Numerical results show that the electron energy distribution functions are significantly modified and the spatial profiles of the rf electric field and rf power density are also demonstrated.