A dynamic macromodel for distributed parameter magnetic microactuators

• 来源期刊: 中国物理B（英文版）
• 关键词: magnetic microactuator macromodel microelectromechanical systems (MEMS)
• 年，卷（期）: 2008,（5）
• 页码范围: 1709-1715
• 页数: 7页
• 语种: 英文

摘要

This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices.The integration for magnetic force is calculated by dividing the microbeam into several segments,and the nonlinear equation set has been developed based on the magnetic circuit principle.In comparison with previous models,the present macromodel accounts for both the micro-magnetic-core reluctance and the coupling between the beam deflection and magnetic force.This mazromodel is validated by comparing with the experimental results available in some papers and finite-element solutions.