Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna

• 来源期刊: 中国物理B（英文版）
• 关键词: inductively coupled plasma Langmuir probe planar antenna density uniformity
• 年，卷（期）: 2008,（11）
• 页码范围: 4242-4246
• 页数: 5页
• 语种: 英文

摘要

This paper develops a humped spiral antenna of top inductively coupled plasma with variable gap.Comparing with planar spiral antennas,it investigates the performance of humped spiral antennae in the calculated electromagnetic configurations and experimental results.It finds that the humped antenna has the improved uniformity of plasma density in the radial direction and the decreased electron temperature in the top inductively coupled plasma.By experimental and theoretical analyses,the plasma performance in the case of humped antennae is considered to be the combined results of the uniform electromagnetic configurations and the depressed capacitively coupling effect.