Diagnosis of Hydrogen Plasma in a Miniature Penning Ion Source by Double Probes

• 来源期刊: 等离子体科学和技术(英文版)
• 年，卷（期）: 2009,（1）
• 页码范围: 48-51
• 页数: 4页
• 语种: 英文

摘要

Parameters of hydrogen plasma in a miniature Penning discharge ion source,including the electron temperature and the electron density,were measured by using double probes.The results indicate that the electron density increases and the electron temperature decreases with the increase in gas pressure and the discharge current.The electron temperature is about 5～9 eV and the electron density is 6.0x1013～1.2×1014 m-3 while the discharge current is in a range of 50～12μA.