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摘要:
A microtribometer is used to measure and compare pull-off forces and friction forces exerted on (a) micro-dimpled silicon surfaces, (b) bare silicon surfaces, and (c) octadecyltrichlorosilane (OTS) treated silicon surfaces at different relative humidity (RH) levels separately. It is found that above a critical RH level, the capillary pull-off force increases abruptly and that the micro-dimple textured surface has a lower critical RH value as well as a higher pull-off force value than the other two surfaces. A micro topography parameter, namely sidewall area ratio, is found to play a major role in controlling the capillary pull-off force. Furthermore, micro-dimpled silicon surface is also proved to be not sensitive to variation in RH level, and can realize a stable and decreased friction coefficient compared with un-textured silicon surfaces. The reservoir-like function of micro dimples is considered to weaken or avoid the breakage effect of liquid bridges at different RH levels, thereby maintaining a stable frictional behaviour.
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篇名 Effect of micro-dimple patterns on capillary pull-off force and friction force of silicon surface
来源期刊 中国物理B(英文版) 学科
关键词 micro-dimpled surface capillary pull-off force frictional property relativc humidity
年,卷(期) 2009,(1) 所属期刊栏目
研究方向 页码范围 231-237
页数 7页 分类号
字数 语种 英文
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micro-dimpled surface
capillary pull-off force
frictional property
relativc humidity
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中国物理B(英文版)
月刊
1674-1056
11-5639/O4
北京市中关村中国科学院物理研究所内
eng
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17050
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