Influence of O2/Ar ratio on the properties of transparent conductive niobium-doped ZnO films

• 来源期刊: 科学通报（英文版）
• 年，卷（期）: 2009,（13）
• 页码范围: 2217-2220
• 页数: 4页
• 语种: 英文
• DOI: 10.1007/s11434-009-0377-y

摘要

Niobium-doped ZnO transparent conductive films are deposited on glass substrates by radio frequency sputtering at 300℃.The influence of O2/Ar ratio on the structural,electrical and optical properties of the as-deposited films is investigated by X-ray diffraction,Hall measurement and optical transmission ratio of 1/12.The average optical transmittance of the films is over 90%.