Preparation and Characterization of Transparent Conductive Nb-Doped ZnO Films by Radio-Frequency Sputtering

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2009,（3）
• 页码范围: 124-126
• 页数: 3页
• 语种: 英文

摘要

Niobium-doped ZnO (NZO) transparent conductive films are deposited on glass substrates by rf sputtering at 300℃.Effects of sputtering power on the structural,morphologic,electrical,and optical properties of NZO films are investigated by x-ray diffraction (XRD),field emission scanning electron microscopy (FESEM),Hall measurement,and optical transmission spectroscopy. The obtained films are polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction.The minimum resistivity of 4.0×10-4 Ω cm is obtained from the film grown at the sputtering power of 170W.The average optical transmittance of the films is over 90%.