Soft Magnetic Thin Films FeCoHfO for High-Frequency Noise Suppression Applications

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2010,（9）
• 页码范围: 195-198
• 页数: 4页
• 语种: 英文
• DOI: 10.1088/0256-307X/27/9/097501

摘要

A series of FeCoHfO films were fabricated by dc magnetron reactive sputtering at varying partial pressure of oxygen(Po2)from 0 to 11.7%,and the electrical and magnetic properties of films have been studied.It is shown that optimal Fe43.29 Co19.51 Hf7.49O29.71 films with desired properties can be obtained when the films were prepared under Po2 = 5.1%.