Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure

• 作者: 张云霄 朱洪亮 潘教清 王圩 赵玲娟
• 来源期刊: 中国物理快报(英文版)
• 学科: 工学
• 关键词: 光电二极管 波导结构 波耦合 稀释 多模 设计 载波 表征
• 年，卷（期）: 2010,（2）
• 页码范围: 299-302
• 页数: 4页
• 分类号: TN364.2 TN252
• 语种: 英文

摘要

A new evanescently coupled uni-traveling carrier photodiode (EC-UTC-PD) is designed, fabricated and characterized, which incorporates a multimode diluted waveguide structure and UTC active waveguide structure together. A high responsivity of 0.68 A/W at 1.55-μm without an anti-reflection coating, a linear photocurrent responsivity of more than 21 mA, and a large -1 dB vertical alignment tolerance of 2.5 μm are achieved.