Numerical studies on flow and thermal fields in MOCVD reactor

• 来源期刊: 科学通报(英文版)
• 学科: 工学
• 关键词: 金属有机化学气相沉积 反应器 数值研究 工艺参数优化 MOCVD生长 热场 旋转模式 动态建模
• 年，卷（期）: 2010,（6）
• 所属期刊栏目: ARTICLES
• 页码范围: 560-566
• 页数: 7页
• 分类号: TP311.13 O472.3
• 语种: 英文

摘要

A systematic study has been performed to investigate the flow and thermal patterns of vertical rotating Thomas Swan MOCVD reactor at low pressure,using 2-D dynamic modeling.By varying and calculating the several important process parameters of the reactor,the optimized conditions of the uniform distributions of velocity and temperature profiles in steady state have been obtained.Then,time-dependent models with the step response perturbation of the total gas rate can help identify the visual transient behavi...