Experimental study of sweep control in e-beam evaporated optical coatings

• 来源期刊: 中国光学快报(英文版)
• 学科: 工学
• 关键词: 扫描控制器 扫描实验 发光涂料 电子束 材料表面 蒸发特性 熔融性能 Ti3O5
• 年，卷（期）: 2010,（6）
• 所属期刊栏目: Thin Films
• 页码范围: 621-623
• 页数: 3页
• 分类号: TQ637 TN873.92
• 语种: 英文

摘要

High performance optical coating requires excellent uniformity of thin-film.Keeping the surface of evaporation material flat is propitious for the stability of vapor plume,and can improve the uniformity of thin-film.Based on the principle of electron beam spot sweep,a pattern controller in domestic coater is designed.For the purpose of even evaporation during auto-sweep,the influence of the depth of material surface in the crucible on the evaporation characteristic is considered.Pre-melting and evaporation experiments are performed on melting material(Ti_3O_5),subliming material(SiO_2),and semi-melting, semi-subliming material(HfO_2).The sweeping experimental results show that using the designed sweep controller can make good performance on evaporation and pre-melting for the above materials.