Preparation of high performance thin-film polarizers

• 来源期刊: 中国光学快报(英文版)
• 学科: 物理学
• 关键词: 光学性能 偏振片 薄膜 厚度控制系统 制备 控制制度 监测方法 连续运行
• 年，卷（期）: 2010,（6）
• 所属期刊栏目: Thin Films
• 页码范围: 624-626
• 页数: 3页
• 分类号: O484.41 O436.3
• 语种: 英文

摘要

The optical performance of thin film polarizers is highly sensitive to the layer thicknesses of thin film.The thicknesses of the sensitive layers are optimized in order to gain broader polarizing zone in such case when the total layer thickness does not increase.An automatic layer thickness control system is established,and errors caused by different monitoring methods are analyzed.With this thickness control system,thin-film polarizers with T_p higher than 98%and T_p/T_s higher than 200:1(T_p and T_s are transmissions for p- and s-polarizations,respectively) with the bandwidth of 11 nm are prepared.Using the system allows for optimum repeatability of three successive runs.