Fabrication and enhanced optical absorption of submicrometer pits array on 6H-SiC via two-beam interference of femtosecond laser

• 来源期刊: 中国光学快报(英文版)
• 学科: 物理学
• 关键词: 亚微米级 光吸收 SiC 阵列 激光干涉 飞秒 制备 碳化硅晶体
• 年，卷（期）: 2010,（12）
• 所属期刊栏目: Ultrafast Optics
• 页码范围: 1203-1206
• 页数: 4页
• 分类号: O484.41 TQ560.6
• 语种: 英文

摘要

We report the fabrication of submicrometer pits array (SP-array) on 6H-SiC surface by the interference of two femtosecond laser beams. Formation mechanisms and optical absorption of SP-array are studied. The relative reflectivity and transmissivity of white light decrease to 10% of the values of SiC crystal, and the optical absorption is enhanced to 97%. The relative reflectivity and transmissivity of incident angles within the range of 20°-60° are kept below 25%. The enhancement mechanism of optical absorption of the SP-array is also discussed.