Measurement of the O2 Dissociation Fraction in RF Low Pressure O2/Ar Plasma Using Optical Emission Spectrometry

• 作者: 刘忠伟 李森 杨丽珍 王正铎 陈强
• 来源期刊: 等离子体科学和技术：英文版
• 学科: 工学
• 关键词: 离子发射 光谱测量 分数 解离 低压 射频 O2 宾夕法尼亚州
• 年，卷（期）: 2011,（4）
• 页码范围: 458-461
• 页数: 4页
• 分类号: O433.1|TB383
• 语种: 英文

摘要

Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational parameters were determined using argon as the actinometer. At a pressure of 30 Pa, the oxygen dissociation fraction decreased from 13.4% to 9.5% as the input power increased from 10 W to 70 W. At an input power of 50 W, the oxygen dissociation fraction decreased from 12.3% to 7.7% when the gas pressure increased from 10 Pa to 40 Pa. The influences of operational parameters on the generation of atomic oxygen were also discussed.

作者信息

序号	姓名	单位	发文数	被引次数	H指数	G指数
1	刘忠伟		1	0	0.0	0.0
2	李森		1	0	0.0	0.0
3	陈强		1	0	0.0	0.0
4	杨丽珍		1	0	0.0	0.0
5	王正铎		1	0	0.0	0.0