Non-scanning, non-interferometric, three-dimensional optical profilometer with nanometer resolution

• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2011,（11）
• 页码范围: 45-47
• 页数: 3页
• 语种: 英文
• DOI: 10.3788/COL201109.101202

摘要

A non-scanning,non-interferometric,three-dimensional (3D) optical profilometer based on geometric optics,critical angle principle,and the use of a charge-coupled device (CCD) camera is presented.The surface profile of the test specimen can be transferred into the reflectance profile.The reflectance profile,obtained from a CCD,is the ratio of the intensity at the critical angle to the intensity obtained at the total internal reflection angle.The optical profilometer provides a sub-micron measuring range with nanometer resolution and can be used to measure roughness or surface defects in real time.Optical profilometers may be distinguished into two types:scanning and non-scanning types.Scanning profilometers have better axial resolution but spend much time in measuring.For three-dimensional (3D) surface profile measurement,scanning approaches such as confocal microscopy[1- 3],or near-field microscopy[4],which have high axial and lateral resolutions for measuring a snall scanned area,arc usually not used to measure a large surface profile.Non-scanning approaches such as the noninterferometric method[5,6],interference microscopy[7-10],and second-harmonic generation[11],can measure a large surface field,but the surface height calculation based on the fringe analysis is more complex.