Accuracy and analysis of long-radius measurement with long trace profiler

• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2011,（11）
• 页码范围: 76-78
• 页数: 3页
• 语种: 英文
• DOI: 10.3788/COL201109.102301

摘要

The long trace profiler (LTP) is proposed to measure radius of curvature (R) and surface figure of a longradius spherical surface in an optical shop.Equipped with a motorized rotary stage and a two-dimensional tilt stage,the LTP scans the full aperture and calculates the absolute radius of curvature of each scanning line based on the least square method.Nonlinear error and manufacture error difference between center and the edge are obtained by comparing R results.The R-limit is validated and expressed as D/R,where D is the aperture of the mirror under test.A full-apertnre three-dimensional figure is also reconstructed based on triangle interpolation.Large optical observing systeus and hngc 1aser installations demand numerons large-scale spherical and aspherical lenses with loug focal length.Array laser installatinns,in particular,strictly demand consistency of focal length.Metrology for long focal length lens has considerable influence on the performance of these optical systems.Focal length can be calculated from the radius of curvature.Thus,developing an instrument for direct long-radius surface measurement tan ensure precision of the long focal length and improve manufacturing efficiency.