Ultra-precision figuring using submerged jet polishing
基本信息来源于合作网站,原文需代理用户跳转至来源网站获取
摘要:
A new removal optimization method called submerged jet polishing(SJP)is reported.Experiments are conducted to obtain the removal shape.Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance.SJP is applied to the corrective figuring of a BK7 optical glass.The flatness is improved from photovolatic(PV)0.066 A to 0.024 λ(λ=632.8 nm)after three iterations,and the root mean square(RMS)value is improved from 0.013 A to 0.00395 A.The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.