Electrical Properties of Lead Zirconate Titanate Thick Film Containing Micro-and Nano-Crystalline Particles

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2012,（5）
• 页码范围: 232-235
• 页数: 4页
• 语种: 英文
• DOI: 10.1088/0256-307X/29/5/058101

摘要

We report the ferroelectric,dielectric and piezoelectric properties of a dense and crack-free lead zirconate titanate (Pb(Zro.52 Tio.48)O3,PZT) thick film containing micro- and nano-crystalline particles. The results show that these electrical properties are dependent strongly on the annealing temperature and film thickness. For the different-annealing-temperature and different-thickness films,the higher-annealing-temperature thicker ones show the larger remnant polarization and smaller coercive field. The dielectric results show that relative dielectric constant achieves the largest value at annealing temperature of 700℃,and increases with the increasing film thickness.For the piezoelectric properties,the longitudinal piezoelectric coefficient increases linearly with the film thickness increasing and the 4-μm-thick PZT film shows the largest value of about 200.65 pC/N.Therefore,the PZT thick films present good electric properties and enlarged potential in MEMS applications.