Phase Composition of Sputtered Film from a Mixture Target of Hydroxyapatite and Strontium-apatite
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摘要:
To obtain an Sr-substituted hydroxyapatite thin film,sputter-coating was performed on a cellulose filter acting as a substrate from the mixture target of hydroxyapatite (HA) and strontium-apatite (SrAp) at an Ar pressure of 0.5-5.0 Pa.The ratio of the SrAp in the mixture target was varied from 25% to 100%.After coating,the films were heated at 700 ℃ to remove the cellulose filter substrate,and the crystalline phases were identified by X-ray diffraction (XRD).The sputter-coated film was identified as the Sr-substituted β-tri-calcium phosphate (TCP) and the Sr-substituted/β-calcium pyrophosphate (CPP) as well as the Sr-substituted HA.The weight ratio of the Sr-substituted HA decreased with increasing Ar pressure or with an increasing ratio of SrAp to HA in the target.The average Sr/(Ca + Sr) molar ratio in the film was 1.9%-3.5% slightly lower than the initial SrAp ratio of the target,and the ratio was not influenced by the Ar pressure.In the (Sr + Ca)/P ratio,the ratio decreased while increasing the SrAp ratio in the target.