A new method to characterize the metallic-oxide films for grayscale lithography
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摘要:
In order to characterize the metallic-oxide grayscale films fabricated by laser direct writing (LDW) in indium film,a new method with micro-Raman spectroscopy and atomic force microscope (AFM) is proposed.Raman spectra exhibit the characteristic band of In2O3 centered at 490 cm-1,in which the intensities increase with the decreasing optical density of the In-In2O3 grayscale films.The mapping information of Raman spectra shows that the signal intensities of the film in the same grayscale area are uniform.Combining with the information of In-In2O3 grayscale film from AFM,the quantitative relationship between the concentration of In2O3 and the Raman signal intensity is shown.Compared with the conventional methods,the resolution of micro-Raman scattering method is appropriate,and the scanning speed is proper to analyze the structure of metallic-oxide grayscale films.