Fast and accurate measurement of large optical surfaces before polishing using a laser tracker
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摘要:
We present a method that accurately measures large optical surfaces before polishing using a laser tracker.Using the scanning mode of the laser tracker considerably improves measurement efficiency and minimizes the dominant errors caused by environmental change.We use this method to measure a Φ1.3-m aspheric mirror and obtain a measurement uncertainty of 0.72 μm (root mean square,RMS).