Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device

• 作者: Rong-De Lu Xiang-Yu Ding Yu-Xuan Ren
• 来源期刊: 光学与光子学期刊(英文)
• 学科: 工学
• 关键词: DIGITAL Micro-mirror DEVICE (DMD) Laser SHAPING MASKLESS Projection Soft LITHOGRAPHY
• 年，卷（期）: 2013,（2）
• 页码范围: 227-231
• 页数: 5页
• 分类号: TN2

摘要

Laser shaping was introduced to maskless projection soft lithography by using digital micro-mirror device (DMD). The predesigned intensity pattern was imprinted onto the DMD and the input laser beam with a Gaussian or quasi-Gaussian distribution will carry the pattern on DMD to etch the resin. It provides a method of precise control of laser beam shapes and?photon-induced curing behavior of resin. This technology provides an accurate micro-fabrication of microstructures used for micro-systems. As a virtual mask generator and a binary-amplitude spatial light modulator, DMD is equivalent to the masks in the conventional exposure system. As the virtual masks and shaped laser beam can be achieved flexibly, it is a good method of precision soft lithography for 2D/3D microstructures.