Polarimetric interferometer for measuring nonlinearity error of heterodyne interferometric displacement system

• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2013,（6）
• 页码范围: 25-29
• 页数: 5页
• 语种: 英文
• DOI: 10.3788/COL201311.061201

摘要

This letter presents a polarimetric interferometer (PI) that can measure the ellipsometric parameter θ with an accuracy of 0.01° leading to a potential accuracy of 17 pm.The PI is constructed and compared with a commercial heterodyne interferometer (HI).Given its low nonlinearity,the PI is used to measure the residual nonlinearity of a heterodyne interferometric displacement system.A rotating half-wave plate is used to compensate for a part of the nonlinearity error caused by the misalignment of the axis between input polarizing states and beamsplitter.