Experimental study of Fourier transform spectrometer based on MEMS micro-mirror

• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2013,（5）
• 页码范围: 72-74
• 页数: 3页
• 语种: 英文
• DOI: 10.3788/COL201311.053003

摘要

We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer.The principle of the spectrometer is theoretically analyzed.A signal acquisition unit and an experimental set-up are designed.The spectrum of the polychromatic light source is obtained at a slantwise reflector angle of 0.238°.The spectrum is analyzed by this system within the near infrared.The experimental results show that the spectral accuracy is less than 3 nm,and the signal-to-noise ratio (SNR) is 18 dB.The spectral resolution is less than 16 nm.