Method for in situ calibration of multiple feedback interferometers

• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2013,（10）
• 页码范围: 86-88
• 页数: 3页
• 语种: 英文
• DOI: 10.3788/COL201311.102601

摘要

A method is presented for in situ resolution calibration of multiple feedback interferometers (MFIs) using two lasers with different feedback levels simultaneously.The laser with weak optical feedback level generates half-wavelength optical fringes,whereas the laser with strong multiple feedback level generates optical nanofringes.By using this method,the number of displaced optical nano-fringes can be easily counted,and the resolution of the MFIs can be accurately determined.The integrated MFIs can be used to measure displacements and calibrate other displacement sensors.