Enhanced Second-Order Resonance Actuation and Frequency Response Modulation of Microcantilever by Dual Coplanar Counter Electrodes

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2013,（10）
• 页码范围: 42-45
• 页数: 4页
• 语种: 英文
• DOI: 10.1088/0256-307X/30/10/100701

摘要

We achieve enhanced actuation of the 2nd-order resonance of a microcantilever in a capacitive microcantilever structure featured by a dual coplanar counter electrodes configuration.A torque about the static point of the 2nd eigenmode is generated in this configuration and therefore enables effective actuation of the 2nd-order resonance.It is further confirmed that the torque has the effect of suppressing the 1st-order resonance.As a result,the frequency response curve of the microcantilever beam can be modulated.Our results suggest that electric actuation of any higher-order resonances of the microcantilever can be realized through a rational design of counter electrodes.