Determining polymer film thickness during manufacturing with broadband transmission

• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2013,（7）
• 页码范围: 37-39
• 页数: 3页
• 语种: 英文
• DOI: 10.3788/COL201311.071201

摘要

A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed,and a measurement system is developed based on this method.The relationship between broadband optical power and film thickness is deduced according to the Lambert-Beer law.The system is composed of a halogen light and an optical power meter.Results show that the measurement error of this method is approximately 1μm,and the resolution of the system is below 0.4 μm for polymer films with less than 100-μm thickness.