Comparative Study on Excitation Temperature, Electron Temperature and Electron Density in an Atmospheric Argon Microwave Plasma

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2014,（5）
• 页码范围: 97-99
• 页数: 3页
• 语种: 中文
• DOI: 10.1088/0256-307X/31/5/055203

摘要

An infinite-volume of atmospheric argon microwave plasma is produced in the microwave plasma source based on the inductive coupling window-reetangular resonator under the input of the microwave power at 2.45 GHz.The excitation temperature of the plasma is studied by using the Boltzmann plot of Ar Ⅰ lines in two different wavelength ranges while the electron temperature is researched by using line-to-continuum intensity ratio of Ar I lines.The electron density is compared by using the Stark broadenings of Ar I lines at 522.13nm and 549.59nm and Hβ line at 486.13nm.