Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization

• 来源期刊: 光：科学与应用（英文版）
• 关键词: computational microscopy light scattering metrology quantitative nanoscale microscopy sub-nanometer uncertainties
• 年，卷（期）: 2016,（1）
• 页码范围: 149-157
• 页数: 9页
• 语种: 中文
• DOI: 10.1038/lsa.2016.38

摘要

Quantitative optical measurements of deep subwavelength,three-dimensional (3D),nanometric structures with sensitivity to sub-nanometer details address a ubiquitous measurement challenge.A Fourier domain normalization approach is used in the Fourier optical imaging code to simulate the full 3D scattered light field of nominally 15 nm-sized structures,accurately replicating the light field as a function of the focus position.Using the full 3D light field,nanometer scale details such as a 2 nm thin conformal oxide and nanometer topography are rigorously fitted for features less than one-thirtiethof the wavelength in size.The densely packed structures are positioned nearly an order of magnitude closer than the conventional Rayleigh resolution limit and can be measured with sub-nanometer parametric uncertainties.This approach enables a practical measurement sensitivity to size variations of only a few atoms in size using a high-throughput optical configuration with broad application in measuring nanometric structures and nanoelectronic devices.