3-16 Development of a Momentum Computed Tomography for Sputtered Ions

• 作者: Wang Wei Yu Deyang Zhang Yuezhao
• 来源期刊: 中国科学院近代物理研究所和兰州重离子研究装置年报：英文版
• 学科: 物理学
• 年，卷（期）: 2016,（1）
• 页码范围: 91-92
• 页数: 2页
• 分类号: O4

摘要

When energetic ions interact with solid surfaces,sputtered ions are produced[1].The normalized distribution function F(m,q,vx,vy,vz)of the ions mass numbers m,charge states q and velocity(vx,vy,vz)in Cartesian coordinate represents kinematical information,and therefore carries important dynamical information of the sputtering process.A new instrument that is able to collect all the outgoing sputtered ions with 2Πsolid angle and subsequently can measure F(m,q,vx,vy,vz)is developed.The spectrometer structure is illustrated,the mathematical basis is presented and an algebraic algorithm is employed to calculate F(m,q,vx,vy,vz)numerically.