The annealing behavior of Ag nanoparticles in silica with and without defects was investigated in this study.Silica samples with and without Ar ion pre-irradiation were implanted with Ag ions and then annealed at temperature from 300 to 850℃.UV-VIS spectroscopy and TEM were used to characterize the optical absorbance property and size distribution of Ag nanoparticles,respectively.Optical absorbance results show that the absorbance intensity of SPR(Surface Plasmon Resonance,SPR)peak from Ag nanoparticles in the sample with pre-irradiation is stronger than in the sample without pre-irradiation,which indicates that the defects produced by pre-irradiation prompt the nucleation of Ag nanoparticles.During annealing,the SPR peak shifts to short wave length direction,as shown in Fig.1.