Performance and reliability improvement of La2O3/Al2O3 nanolaminates using ultraviolet ozone post treatment

• 来源期刊: 中国物理B（英文版）
• 关键词: La2O3/Al2O3 nanolaminates atomic layer deposition ultraviolet ozone post treatment annealing
• 年，卷（期）: 2017,（5）
• 页码范围: 376-381
• 页数: 6页
• 语种: 英文
• DOI: 10.1088/1674-1056/26/5/057702

摘要

La-based binary or ternary compounds have recently attracted a great deal of attention as a potential candidate to replace the currently used Hf-based dielectrics in future transistor and capacitor devices for sub-22 generation.However,the hygroscopic nature of La2O3 hampers its application as dielectrics in electron devices.To cope with this challenge,ultraviolet (UV) ozone post treatment is proposed to suppress the moisture absorption in the H2O-based atomic layer deposition (ALD) La2O3/A12O3 nanolaminates which is related to the residual hydroxyl/hydrogen groups after annealing.The x-ray photoelectron spectroscopy (XPS) and conductive atomic force microscopy (AFM) results indicate that the moisture absorption of the H2O-based ALD La2O3/A12O3 nanolaminates is efficiently suppressed after 600 ℃ annealing,and the electrical characteristics are greatly improved.