In-situ stitching interferometric test system for large plano optics

• 来源期刊: 先进制造进展（英文版）
• 关键词: In-situ measurement Subaperture stitching Dynamic interferometry Large plano optics
• 年，卷（期）: 2018,（2）
• 页码范围: 195-203
• 页数: 9页
• 语种: 英文

摘要

In-situ testing is an ideal technology for improving the precision and efficiency of fabrication.We developed an in-situ subaperture stitching interferometric test system for large plano optics in the workshop environment with high precision and satisfactory repeatability.In this paper,we provide a brief account of this system and the principle of insitu subaperture stitching measurement.Several validation tests are presented,which demonstrate that the developed system is capable of realizing in-situ testing.The size of optical flats can be measured is up to 420 mm × 780 mm,and repeatability is smaller than 0.03λ.The paper also discusses the necessary requirements for a suitable workshop environment for ensuring that the tests are stable and reliable.