Deposition of Phase-pure Cr2AlC Coating by DC Magnetron Sputtering and Post Annealing Using Cr-Al-C Targets with Controlled Elemental Composition but Different Phase Compositions

• 来源期刊: 材料科学技术（英文版）
• 年，卷（期）: 2018,（3）
• 页码范围: 466-471
• 页数: 6页
• 语种: 英文

摘要

Polycrystalline Cr2AlC coatings were prepared on M38G superalloy using a two-step method consisting of magnetron sputtering from Cr-Al-C composite targets at room temperature and subsequent annealing at 620 ℃.Particularly,various targets synthesized by hot pressing mixture of Cr,Al,and C powders at 650-1000 ℃ were used.it was found that regardless of the phase compositions and density of the composite targets,when the molar ratio of Cr∶Al∶C in the starting materials was 2∶1∶1,phase-pure crystalline Cr2AlC coatings were prepared by magnetron sputtering and post crystallization.The Cr2AlC coatings were dense and crack-free and had a duplex structure.The adhesion strength of the coating deposited on M38G superalloy from the 800 ℃C hot-pressed target and then annealed at 620 ℃C for 20 h in Ar exceeded 82 ± 6 MPa.while its hardness was 12 ± 3 GPa.