Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2018,（3）
• 页码范围: 21-24
• 页数: 4页
• 语种: 英文
• DOI: 10.3788/COL201816.031201

摘要

This Letter demonstrates a novel lateral shear interferometer system for simultaneous measurement of three-dimensional (3D) shape and thickness of transparent objects.Multi-frequency fringe patterns can be created by tilting mirrors at different inclination angles.With a single camera,the multi-frequency fringes are recorded in one image.The phase-shift of the fringes can be generated synchronously only by moving a plane-parallel plate along an in-plane parallel direction.According to the feature of transparent materials,the thickness and 3D shape can be reconstructed simultaneously based on the relationship between the in-plane displacement and their characteristics.The experiment was conducted on a thin transparent film subjected to a shearing force,which verifies the feasibility of the proposed system.