Tissue equivalent proportional counter(TEPC)[1;2]is widely used for microdosimetric measurements of heavy ion beams,which provide basic data for calculating relative biological effectiveness(RBE).To study the influence of TEPC wall on microdosimetric spectra of heavy ion beams,an ideal TEPC combined with Monte Carlo(MC)simulations was introduced to accurately calculate the microdosimetric spectra at different water equivalent depths of carbon ion beams.Three setups used in Gate-based[3]Monte Carlo simulations are shown in Fig.1,namely the ideal TEPC,general TEPC and the TEPC wall as a water layer with a fixed water equivalent thickness respectively.