Many emerging applications of nanopore detection such as proteins,RNA and DNA has been reported,in which the size and structure of the biomolecules is detected by the block current when they transport through a single nanopore[1].The smaller the size of the nanopore is,the higher detection accuracy will be obtained.Nanochannel fabrication using the latent track of high LET heavy ions in solids has the advantage of precise pore geometry control and pore production.Compared with solid nanopore fabrication by drilling in silicon nitride membrane,polymeric nanopore using ion track etching technique can reduce both the material and fabrication cost.