Research on Ultimate Vacuum and Pumping Capacity of TiZrV Coated Pipe

• 作者: Lin Xiaojian Liu Jianlong Meng Jun
• 来源期刊: 中国科学院近代物理研究所和兰州重离子研究装置年报:英文版
• 学科: 工学
• 关键词: VACUUM ACTIVATION COATED
• 年，卷（期）: 2018,（1）
• 页码范围: 262-263
• 页数: 2页
• 分类号: TL5

摘要

TiZrV non-evaporable getters have been widely used to improve vacuum properties in the field of accelerators due to the excellent activation temperature[1].The ultimate vacuum and pumping capacity of TiZrV film tubes at different activation temperatures were investigated in the experiment.The results show that the coated pipe is not activated at 180℃.The coated pipe is activated at 220℃and the ultimate vacuum is decreased by about 25%relative to the uncoated pipe,and the coated pipe enables a uniform pressure distribution therein.