Similarity principle of microwave argon plasma at low pressure

• 来源期刊: 中国物理B（英文版）
• 关键词: similarity principle microwave plasma low pressure 2D fluid model
• 年，卷（期）: 2018,（8）
• 页码范围: 396-402
• 页数: 7页
• 语种: 英文
• DOI: 10.1088/1674-1056/27/8/085206

摘要

In order to validate the similarity principle of microwave breakdown, a two-dimensional (2D) fluid model of low-pressure microwave argon plasma is established and solved by the finite-element method. Proportional conditions are used in this model to build three different breakdown processes that meet the premise of a similarity principle, and these breakdown processes are called"similar cases"in this paper. Similar cases have proportionately sized breakdown regions, where the ratio of frequency of incident microwave f to gas pressure p ( f/p), and the reduced field E/p in them are kept the same. All the important physical parameters such as electron density, electron temperature, and reduced electric field can be obtained from the simulation of this model. The results show that the parameters between similar cases are in constant ratio without changing with time, which means that the similarity principle is also valid in microwave breakdown.