Novel single-transverse-mode control of VCSELs withdielectric mode filter

• 来源期刊: 中国物理B（英文版）
• 关键词: single-mode dielectric mode filter anti-phase reflection mirror reflectivity VCSEL
• 年，卷（期）: 2018,（7）
• 页码范围: 411-415
• 页数: 5页
• 语种: 英文
• DOI: 10.1088/1674-1056/27/7/074210

摘要

We establish a novel method of controlling the transverse modes of vertical cavity surface emitting lasers (VCSELs) to achieve 1 mW single-fundamental-mode lasing. A dielectric mode filter is installed on top of the VCSEL. The dielectric layer (SiO2) is deposited and patterned to modify the mirror reflectivity across the oxide aperture via antiphase reflections. This mode selection is nondestructive and universally applicable for other structures under single transverse mode. De-structive etching techniques (dry/wet) or epitaxial regrowth are also not required. This method simplifies the preparation process and improves the repeatability of the device. Measurements show that under continuous-wave current injection, the side-mode suppression ratio exceeds 30 dB.