CL-TWE Mach-Zehnder electro-optic modulator based on InP-MQW optical waveguides

• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2019,（6）
• 页码范围: 36-40
• 页数: 5页
• 语种: 英文
• DOI: 10.3788/COL201917.061301

摘要

In this Letter,we reported the preliminary results of an integrating periodically capacitive-loaded traveling wave electrode (CL-TWE) Mach-Zehnder modulator (MZM) based on InP-based multiple quantum well (MQW) optical waveguides.The device configuration mainly includes an optical Mach-Zehnder interferometer,a direct current electrode,two phase electrodes,and a CL-TWE consisting of a U electrode and an I electrode.The modulator was fabricated on a 3 in.InP epitaxial wafer by standard photolithography,inductively coupled plasma dry etching,wet etching,electroplating,etc.Measurement results show that the MZM exhibits a 3 dB electro-optic bandwidth of about 31 GHz,a Vπ of 3 V,and an extinction ratio of about 20 dB.