High-sensitivity FBG microphone with static pressure equalization and optimized response
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摘要:
We present a high-sensitivity fiber Bragg grating (FBG)-based microphone with a flat response and static pressure equalization.A very high dynamic sensitivity of the microphone is achieved by a pressure sensing structure based on a carbon fiber diaphragm.Static pressure equalization is realized by a balance structure with a capillary glass tube.The resonances of the sensor are suppressed by air damping structures,and a broadened fiat response is achieved.An acoustic-solid interaction model was used to analyze the response characteristics of the microphone.An experimental prototype was produced and tested,and the results are well consistent with the design.The tested sensitivity was-10 dB re 1 pm/Pa from 10 Hz to 2.5 kHz with a fluctuation of less than ±1.5 dB.Combined with the phase-generated-carrier-based coherent detection scheme,the microphone can achieve a sound resolution of the milli-pascal level.The static pressure sensitivity is measured to be-0.27 pm/atm,which is 100 dB lower than the dynamic sensitivity.