Preparation of ZrC-SiC composite coatings by chemical vapor deposition and study of co-deposition mechanism

• 来源期刊: 材料科学技术（英文版）
• 年，卷（期）: 2019,（12）
• 页码范围: 2942-2949
• 页数: 8页
• 语种: 英文

摘要

In this work,the ZrC-SiC composite coatings were co-deposited by chemical vapor deposition (CVD)using ZrCl4,MTS,CH4 and H2 as raw materials.The morphologies,compositions and phases of the composite coatings were characterized by scanning electron microscopy (SEM),energy dispersive X-ray spectroscopy (EDS) and X-ray diffraction (XRD).The results indicated that the morphologies,compositions and phases of the composite coatings were related to the deposition temperature,the flow rate of the carrier H2 gas,and the ratio of C/Zr.Moreover,the co-deposition mechanism of the composite coatings was also studied.It was found that different deposition temperatures resulted in different deposition mechanisms.At temperatures in the range of 1150-1250 ℃,the ZrC-SiC co-deposition was controlled by the surface kinetic process.At temperatures in the range of 1250-1400 ℃,the ZrC-SiC co-deposition was controlled by the mass transport process.